Zhong Chen 0002, Junjie Shi, Songwei Zhu, Xineng Zhong, Xianmin Zhang. Design and Testing of a Damped Piezo-Driven Decoupled XYZ Stage. In IEEE International Conference on Robotics and Automation, ICRA 2021, Xi'an, China, May 30 - June 5, 2021. pages 6986-6991, IEEE, 2021. [doi]
Abstract is missing.