An interface for a 300°/s capacitive 2-axis micro-gyroscope with pseudo-CT readout

Lasse Aaltonen, Timo Speeti, Mikko Saukoski, Kari Halonen. An interface for a 300°/s capacitive 2-axis micro-gyroscope with pseudo-CT readout. In IEEE International Solid-State Circuits Conference, ISSCC 2009, Digest of Technical Papers, San Francisco, CA, USA, 8-12 February, 2009. pages 344-345, IEEE, 2009. [doi]

Abstract

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