David Abercrombie, Fedor Pikus, Cosmin Cazan. Use of lithography simulation for the calibration of equation-based design rule checks. In Proceedings of the 46th Design Automation Conference, DAC 2009, San Francisco, CA, USA, July 26-31, 2009. pages 67-70, ACM, 2009. [doi]
@inproceedings{AbercrombiePC09, title = {Use of lithography simulation for the calibration of equation-based design rule checks}, author = {David Abercrombie and Fedor Pikus and Cosmin Cazan}, year = {2009}, doi = {10.1145/1629911.1629931}, url = {http://doi.acm.org/10.1145/1629911.1629931}, tags = {rule-based, rules, design}, researchr = {https://researchr.org/publication/AbercrombiePC09}, cites = {0}, citedby = {0}, pages = {67-70}, booktitle = {Proceedings of the 46th Design Automation Conference, DAC 2009, San Francisco, CA, USA, July 26-31, 2009}, publisher = {ACM}, isbn = {978-1-60558-497-3}, }