Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser - researchr publication authors

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Yuki Adachi, Yifan Xiong, Hanqiao Ye, Rubing Zuo, Masaya Morita, Kenta Kaichi, Ryosei Kinoshita, Masato Morifuji, Akihiro Maruta, Hirotake Kajii, Masahiko Kondow. Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser. IEICE Electronic Express, 20(7):20230054, 2023. [doi]

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