Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser

Yuki Adachi, Yifan Xiong, Hanqiao Ye, Rubing Zuo, Masaya Morita, Kenta Kaichi, Ryosei Kinoshita, Masato Morifuji, Akihiro Maruta, Hirotake Kajii, Masahiko Kondow. Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser. IEICE Electronic Express, 20(7):20230054, 2023. [doi]

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