Improved rotation angle of a MEMS analog torsional micro-mirror with auxiliary fixed-free beams

Saeid Afrang, Malek Hassanzadeh, Ghader Rezazadeh. Improved rotation angle of a MEMS analog torsional micro-mirror with auxiliary fixed-free beams. In Proceedings of the 4th International Conference on Control, Mechatronics and Automation, ICCMA '16, Barcelona, Spain, December 7-11, 2016. pages 154-157, ACM, 2016. [doi]

Abstract

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