A new MEMS based variable capacitor with wide tunability, high linearity and low actuation voltage

Saeid Afrang, Hamed Mobki, Morteza Homayoun Sadeghi, Ghader Rezazadeh. A new MEMS based variable capacitor with wide tunability, high linearity and low actuation voltage. Microelectronics Journal, 46(2):191-197, 2015. [doi]

Abstract

Abstract is missing.