Kanak Agarwal. Frequency domain decomposition of layouts for double dipole lithography. In Sachin S. Sapatnekar, editor, Proceedings of the 47th Design Automation Conference, DAC 2010, Anaheim, California, USA, July 13-18, 2010. pages 404-407, ACM, 2010. [doi]
@inproceedings{Agarwal10-1,
title = {Frequency domain decomposition of layouts for double dipole lithography},
author = {Kanak Agarwal},
year = {2010},
doi = {10.1145/1837274.1837374},
url = {http://doi.acm.org/10.1145/1837274.1837374},
tags = {layout},
researchr = {https://researchr.org/publication/Agarwal10-1},
cites = {0},
citedby = {0},
pages = {404-407},
booktitle = {Proceedings of the 47th Design Automation Conference, DAC 2010, Anaheim, California, USA, July 13-18, 2010},
editor = {Sachin S. Sapatnekar},
publisher = {ACM},
isbn = {978-1-4503-0002-5},
}