Pre- and post-BD electrical conduction of stressed HfO::2::/SiO::2:: MOS gate stacks observed at the nanoscale

L. Aguilera, M. Porti, M. Nafría, X. Aymerich. Pre- and post-BD electrical conduction of stressed HfO::2::/SiO::2:: MOS gate stacks observed at the nanoscale. Microelectronics Reliability, 45(9-11):1390-1393, 2005. [doi]

@article{AguileraPNA05,
  title = {Pre- and post-BD electrical conduction of stressed HfO::2::/SiO::2:: MOS gate stacks observed at the nanoscale},
  author = {L. Aguilera and M. Porti and M. Nafría and X. Aymerich},
  year = {2005},
  doi = {10.1016/j.microrel.2005.07.105},
  url = {http://dx.doi.org/10.1016/j.microrel.2005.07.105},
  researchr = {https://researchr.org/publication/AguileraPNA05},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {45},
  number = {9-11},
  pages = {1390-1393},
}