Farooq Ahmad, John O. Dennis, Nor Hisham Hamid, Mohd Haris M. Khir, Abdelaziz Yousif Ahmed. Design and modeling of MEMS resonator for magnetic field sensing using hybrid actuation technique. In 2012 IEEE Asia Pacific Conference on Circuits and Systems, APCCAS 2010, Kuala Lumpur, Malaysia, December 6-9, 2010. pages 827-830, IEEE, 2010. [doi]
Abstract is missing.