A 3-axis PZT-based MEMS gyroscope in 0.18μm CMOS - researchr publication authors

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Imran Ahmed, David Halupka, Bertram Leesti, James A. Cherry, Robert McKenzie, Alireza Nilchi, Hamed Mazhab-Jafari, W. Martin Snelgrove, Raymond Chik. A 3-axis PZT-based MEMS gyroscope in 0.18μm CMOS. In Proceedings of the 38th European Solid-State Circuit conference, ESSCIRC 2012, Bordeaux, France, September 17-21, 2012. pages 241-244, IEEE, 2012. [doi]

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