A 3-axis PZT-based MEMS gyroscope in 0.18μm CMOS

Imran Ahmed, David Halupka, Bertram Leesti, James A. Cherry, Robert McKenzie, Alireza Nilchi, Hamed Mazhab-Jafari, W. Martin Snelgrove, Raymond Chik. A 3-axis PZT-based MEMS gyroscope in 0.18μm CMOS. In Proceedings of the 38th European Solid-State Circuit conference, ESSCIRC 2012, Bordeaux, France, September 17-21, 2012. pages 241-244, IEEE, 2012. [doi]

@inproceedings{AhmedHLCMNMSC12,
  title = {A 3-axis PZT-based MEMS gyroscope in 0.18μm CMOS},
  author = {Imran Ahmed and David Halupka and Bertram Leesti and James A. Cherry and Robert McKenzie and Alireza Nilchi and Hamed Mazhab-Jafari and W. Martin Snelgrove and Raymond Chik},
  year = {2012},
  doi = {10.1109/ESSCIRC.2012.6341303},
  url = {http://dx.doi.org/10.1109/ESSCIRC.2012.6341303},
  researchr = {https://researchr.org/publication/AhmedHLCMNMSC12},
  cites = {0},
  citedby = {0},
  pages = {241-244},
  booktitle = {Proceedings of the 38th European Solid-State Circuit conference, ESSCIRC 2012, Bordeaux, France, September 17-21, 2012},
  publisher = {IEEE},
  isbn = {978-1-4673-2212-6},
}