The abnormality in gate oxide failure induced by stress-enhanced diffusion of polycrystalline silicon

Yongseok Ahn, Sanghyun Lee, Gwanhyeob Koh, Taeyoung Chung, Kinam Kim. The abnormality in gate oxide failure induced by stress-enhanced diffusion of polycrystalline silicon. Microelectronics Reliability, 42(3):349-354, 2002. [doi]

Abstract

Abstract is missing.