Plasma induced damage investigation in the fully depleted SOI technology

M. Akbal, G. Ribes, M. Guillermet, L. Vallier. Plasma induced damage investigation in the fully depleted SOI technology. In 2015 International Conference on IC Design & Technology, ICICDT 2015, Leuven, Belgium, June 1-3, 2015. pages 1-4, IEEE, 2015. [doi]

Abstract

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