eff CMOS technology with copper interconnects

Chekib Akrout, John Bialas, Miles G. Canada, Duane Cawthron, James Corr, Bijan Davari, Robert Floyd, Stephen F. Geissler, Ronald Goldblatt, Robert Houle, Paul Kartschoke, Diane Kramer, Pete McCormick, Norman J. Rohrer, Gerard Salem, Ronald Schulz, Lisa Su, Linda Whitney. eff CMOS technology with copper interconnects. J. Solid-State Circuits, 33(11):1609-1616, 1998. [doi]

Abstract

Abstract is missing.