Yazan Mohammad Al-Rawashdeh, Mohammad Al Janaideh, Marcel Heertjes. On Step-and-Scan Trajectories used in Wafer Scanners in Semiconductor Manufacturing. In IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2021, Prague, Czech Republic, September 27 - Oct. 1, 2021. pages 7580-7586, IEEE, 2021. [doi]
Abstract is missing.