Yazan Mohammad Al-Rawashdeh, Mohammad Al Janaideh, Marcel Heertjes. On Synchronization of Generic Lithography Machine Open-chains using a Novel Fine-Positioning Stage System. In IEEE Conference on Control Technology and Applications, CCTA 2021, San Diego, CA, USA, August 9-11, 2021. pages 1089-1094, IEEE, 2021. [doi]
Abstract is missing.