Monte Carlo Calculation of One- and Two-Dimensional Particle and Damage Distributions for Ion-Implanted Dopants in Silicon

J. Albers. Monte Carlo Calculation of One- and Two-Dimensional Particle and Damage Distributions for Ion-Implanted Dopants in Silicon. IEEE Trans. on CAD of Integrated Circuits and Systems, 4(4):374-383, 1985. [doi]

Abstract

Abstract is missing.