Arvid Amthor, Stephan Zschäck, Christoph Ament. Friction compensation for Nanopositioning and Nanomeasuring Machines. In 11th IEEE International Workshop on Advanced Motion Control, AMC 2010, Nagaoka University of Technology, Nagaoka, Niigata, Japan, March 21st - 24th, 2010. pages 7-12, IEEE, 2010. [doi]
Abstract is missing.