Electrostatic Shield TSVs to Suppress Coupling Among Stacked ICs

Yuuki Araga, Kikuchi Katsuya, Masahiro Aoyagi. Electrostatic Shield TSVs to Suppress Coupling Among Stacked ICs. In 2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019. pages 1-3, IEEE, 2019. [doi]

Abstract

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