Fumihito Arai, Kouhei Motoo, Toshio Fukuda, Tohoru Katsuragi. High Sensitive Micro Touch Sensor with Piezoelectric Thin Film for Micro Pipetting Works under Microscope. In Proceedings of the 2004 IEEE International Conference on Robotics and Automation, ICRA 2004, April 26 - May 1, 2004, New Orleans, LA, USA. pages 1352-1357, IEEE, 2004. [doi]
Abstract is missing.