Localized growth and functionalization of silicon nanowires for MEMS sensor applications

Stephen P. Arnold, S. M. Prokes, Mona E. Zaghloul. Localized growth and functionalization of silicon nanowires for MEMS sensor applications. In Proceedings of the 2005 European Conference on Circuit Theory and Design, ECCTD 2005, Cork Ireland, August 29th - September 1st 2005. pages 397-400, IEEE, 2005. [doi]

Abstract

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