Use of In-Fab Parametric Testing for Process Control of Semiconductor Manufacturing

Robert W. Atherton, David M. Campbell. Use of In-Fab Parametric Testing for Process Control of Semiconductor Manufacturing. In Proceedings International Test Conference 1983, Philadelphia, PA, USA, October 1983. pages 238-247, IEEE Computer Society, 1983.

Authors

Robert W. Atherton

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David M. Campbell

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