Robert W. Atherton, David M. Campbell. Use of In-Fab Parametric Testing for Process Control of Semiconductor Manufacturing. In Proceedings International Test Conference 1983, Philadelphia, PA, USA, October 1983. pages 238-247, IEEE Computer Society, 1983.
@inproceedings{AthertonC83,
title = {Use of In-Fab Parametric Testing for Process Control of Semiconductor Manufacturing},
author = {Robert W. Atherton and David M. Campbell},
year = {1983},
tags = {testing},
researchr = {https://researchr.org/publication/AthertonC83},
cites = {0},
citedby = {0},
pages = {238-247},
booktitle = {Proceedings International Test Conference 1983, Philadelphia, PA, USA, October 1983},
publisher = {IEEE Computer Society},
}