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A Fast Mask Manufacturability and Process Variation Aware OPC Algorithm with Exploiting a Novel Intensity Estimation Model

Ahmed Awad, Atsushi Takahashi 0001, Chikaaki Kodama. A Fast Mask Manufacturability and Process Variation Aware OPC Algorithm with Exploiting a Novel Intensity Estimation Model. IEICE Transactions, 99-A(12):2363-2374, 2016. [doi]

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