Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement

Ahmed Awad, Atsushi Takahashi 0001, Satoshi Tanaka, Chikaaki Kodama. Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement. IPSJ T. on System LSI Design Methodology, 10:28-38, 2017. [doi]

Authors

Ahmed Awad

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Atsushi Takahashi 0001

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Satoshi Tanaka

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Chikaaki Kodama

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