Ahmed Awad, Atsushi Takahashi 0001, Satoshi Tanaka, Chikaaki Kodama. Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement. IPSJ T. on System LSI Design Methodology, 10:28-38, 2017. [doi]
@article{AwadTTK17,
title = {Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement},
author = {Ahmed Awad and Atsushi Takahashi 0001 and Satoshi Tanaka and Chikaaki Kodama},
year = {2017},
doi = {10.2197/ipsjtsldm.10.28},
url = {http://dx.doi.org/10.2197/ipsjtsldm.10.28},
researchr = {https://researchr.org/publication/AwadTTK17},
cites = {0},
citedby = {0},
journal = {IPSJ T. on System LSI Design Methodology},
volume = {10},
pages = {28-38},
}