Efficient Full-Chip Yield Analysis Methodology for OPC-Corrected VLSI Designs

Valery Axelrad, Nicolas B. Cobb, M. O Brien, Thuy Do, Tom Donnelly, Yuri Granik, Emile Y. Sahouria, Victor Boksha, Artur Balasinski. Efficient Full-Chip Yield Analysis Methodology for OPC-Corrected VLSI Designs. In 1st International Symposium on Quality of Electronic Design (ISQED 2000), 20-22 March 2000, San Jose, CA, USA. pages 461-466, IEEE Computer Society, 2000. [doi]

Abstract

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