Farrokh Ayazi, Haoran Wen, Gregory V. Junek, Zhenming Liu, Chris Heaton. Fully Integrated High-Frequency MEMS and CMOS Inertial Measurement Systems: Taking a Journey from Silicon to Silicon Carbide. In IEEE/ION Position, Location and Navigation Symposium, PLANS 2023, Monterey, CA, USA, April 24-27, 2023. pages 18-24, IEEE, 2023. [doi]
Abstract is missing.