A New Configuration of a Six Degrees-of-freedom Parallel Robot for MEMS Fabrication

Hagay Bamberger, Moshe Shoham. A New Configuration of a Six Degrees-of-freedom Parallel Robot for MEMS Fabrication. In Proceedings of the 2004 IEEE International Conference on Robotics and Automation, ICRA 2004, April 26 - May 1, 2004, New Orleans, LA, USA. pages 4545-4550, IEEE, 2004. [doi]

Abstract

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