Shayak Banerjee, Kanak B. Agarwal, Michael Orshansky. Ground rule slack aware tolerance-driven optical proximity correction for local metal interconnects. In Jacqueline Snyder, Rakesh Patel, Tom Andre, editors, IEEE Custom Integrated Circuits Conference, CICC 2010, San Jose, California, USA, 19-22 September, 2010, Proceedings. pages 1-4, IEEE, 2010. [doi]
Abstract is missing.