Bistability in a CMOS-MEMS Thermally Tuned Microbeam Resonator - researchr publication authors

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J. Barceló, I. de Paúl, Sebastiàn A. Bota, Jaume Segura, Jaume Verd. Bistability in a CMOS-MEMS Thermally Tuned Microbeam Resonator. In IEEE International Symposium on Circuits and Systems, ISCAS 2018, 27-30 May 2018, Florence, Italy. pages 1-5, IEEE, 2018. [doi]

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