Bistability in a CMOS-MEMS Thermally Tuned Microbeam Resonator

J. Barceló, I. de Paúl, Sebastiàn A. Bota, Jaume Segura, Jaume Verd. Bistability in a CMOS-MEMS Thermally Tuned Microbeam Resonator. In IEEE International Symposium on Circuits and Systems, ISCAS 2018, 27-30 May 2018, Florence, Italy. pages 1-5, IEEE, 2018. [doi]

@inproceedings{BarceloPBSV18,
  title = {Bistability in a CMOS-MEMS Thermally Tuned Microbeam Resonator},
  author = {J. Barceló and I. de Paúl and Sebastiàn A. Bota and Jaume Segura and Jaume Verd},
  year = {2018},
  doi = {10.1109/ISCAS.2018.8351225},
  url = {https://doi.org/10.1109/ISCAS.2018.8351225},
  researchr = {https://researchr.org/publication/BarceloPBSV18},
  cites = {0},
  citedby = {0},
  pages = {1-5},
  booktitle = {IEEE International Symposium on Circuits and Systems, ISCAS 2018, 27-30 May 2018, Florence, Italy},
  publisher = {IEEE},
  isbn = {978-1-5386-4881-0},
}