CMOS monolithic mechatronic microsystem for surface imaging and force response studies - researchr publication authors

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Diego Barrettino, Sadik Hafizovic, Tormod Volden, Jan Sedivý, Kay-Uwe Kirstein, Andreas Hierlemann. CMOS monolithic mechatronic microsystem for surface imaging and force response studies. J. Solid-State Circuits, 40(4):951-959, 2005. [doi]

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