CMOS monolithic mechatronic microsystem for surface imaging and force response studies

Diego Barrettino, Sadik Hafizovic, Tormod Volden, Jan SedivĂ˝, Kay-Uwe Kirstein, Andreas Hierlemann. CMOS monolithic mechatronic microsystem for surface imaging and force response studies. J. Solid-State Circuits, 40(4):951-959, 2005. [doi]

@article{BarrettinoHVSKH05,
  title = {CMOS monolithic mechatronic microsystem for surface imaging and force response studies},
  author = {Diego Barrettino and Sadik Hafizovic and Tormod Volden and Jan SedivĂ˝ and Kay-Uwe Kirstein and Andreas Hierlemann},
  year = {2005},
  doi = {10.1109/JSSC.2004.842868},
  url = {https://doi.org/10.1109/JSSC.2004.842868},
  researchr = {https://researchr.org/publication/BarrettinoHVSKH05},
  cites = {0},
  citedby = {0},
  journal = {J. Solid-State Circuits},
  volume = {40},
  number = {4},
  pages = {951-959},
}