Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors

Marco Baù, Marco Ferrari 0002, Habiba Begum, Abid Ali, Joshua E.-Y. Lee, Vittorio Ferrari. Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors. Sensors, 20(12):3483, 2020. [doi]

Authors

Marco Baù

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Marco Ferrari 0002

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Habiba Begum

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Abid Ali

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Joshua E.-Y. Lee

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Vittorio Ferrari

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