Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors

Marco Baù, Marco Ferrari 0002, Habiba Begum, Abid Ali, Joshua E.-Y. Lee, Vittorio Ferrari. Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors. Sensors, 20(12):3483, 2020. [doi]

@article{BauFBALF20,
  title = {Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors},
  author = {Marco Baù and Marco Ferrari 0002 and Habiba Begum and Abid Ali and Joshua E.-Y. Lee and Vittorio Ferrari},
  year = {2020},
  doi = {10.3390/s20123483},
  url = {https://doi.org/10.3390/s20123483},
  researchr = {https://researchr.org/publication/BauFBALF20},
  cites = {0},
  citedby = {0},
  journal = {Sensors},
  volume = {20},
  number = {12},
  pages = {3483},
}