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Development of a MEMS position transducer using bulk piezoresistivity of suspensions

Ali Bazaei, Mohammad Maroufi, Ali Mohammadi, S. O. Reza Moheimani. Development of a MEMS position transducer using bulk piezoresistivity of suspensions. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014, Besancon, France, July 8-11, 2014. pages 1469-1473, IEEE, 2014. [doi]

Authors

Ali Bazaei

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Mohammad Maroufi

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Ali Mohammadi

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S. O. Reza Moheimani

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