Development of a MEMS position transducer using bulk piezoresistivity of suspensions

Ali Bazaei, Mohammad Maroufi, Ali Mohammadi, S. O. Reza Moheimani. Development of a MEMS position transducer using bulk piezoresistivity of suspensions. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014, Besancon, France, July 8-11, 2014. pages 1469-1473, IEEE, 2014. [doi]

@inproceedings{BazaeiMMM14,
  title = {Development of a MEMS position transducer using bulk piezoresistivity of suspensions},
  author = {Ali Bazaei and Mohammad Maroufi and Ali Mohammadi and S. O. Reza Moheimani},
  year = {2014},
  doi = {10.1109/AIM.2014.6878290},
  url = {https://doi.org/10.1109/AIM.2014.6878290},
  researchr = {https://researchr.org/publication/BazaeiMMM14},
  cites = {0},
  citedby = {0},
  pages = {1469-1473},
  booktitle = {IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014, Besancon, France, July 8-11, 2014},
  publisher = {IEEE},
}