Advanced TCAD for predictive FinFETs Vth mismatch using full 3D process/device simulation

E. M. Bazizi, A. Zaka, T. Herrmann, Francis Benistant, J. H. M. Tin, J. P. Goh, L. Jiang, M. Joshi, H. van Meer, K. Korablev. Advanced TCAD for predictive FinFETs Vth mismatch using full 3D process/device simulation. In 44th European Solid State Device Research Conference, ESSDERC 2014, Venice Lido, Italy, September 22-26, 2014. pages 341-344, IEEE, 2014. [doi]

@inproceedings{BaziziZHBTGJJMK14,
  title = {Advanced TCAD for predictive FinFETs Vth mismatch using full 3D process/device simulation},
  author = {E. M. Bazizi and A. Zaka and T. Herrmann and Francis Benistant and J. H. M. Tin and J. P. Goh and L. Jiang and M. Joshi and H. van Meer and K. Korablev},
  year = {2014},
  doi = {10.1109/ESSDERC.2014.6948830},
  url = {http://dx.doi.org/10.1109/ESSDERC.2014.6948830},
  researchr = {https://researchr.org/publication/BaziziZHBTGJJMK14},
  cites = {0},
  citedby = {0},
  pages = {341-344},
  booktitle = {44th European Solid State Device Research Conference, ESSDERC 2014, Venice Lido, Italy, September 22-26, 2014},
  publisher = {IEEE},
  isbn = {978-1-4799-4378-4},
}