E. M. Bazizi, A. Zaka, T. Herrmann, Francis Benistant, J. H. M. Tin, J. P. Goh, L. Jiang, M. Joshi, H. van Meer, K. Korablev. Advanced TCAD for predictive FinFETs Vth mismatch using full 3D process/device simulation. In 44th European Solid State Device Research Conference, ESSDERC 2014, Venice Lido, Italy, September 22-26, 2014. pages 341-344, IEEE, 2014. [doi]
Abstract is missing.