Advanced TCAD for predictive FinFETs Vth mismatch using full 3D process/device simulation

E. M. Bazizi, A. Zaka, T. Herrmann, Francis Benistant, J. H. M. Tin, J. P. Goh, L. Jiang, M. Joshi, H. van Meer, K. Korablev. Advanced TCAD for predictive FinFETs Vth mismatch using full 3D process/device simulation. In 44th European Solid State Device Research Conference, ESSDERC 2014, Venice Lido, Italy, September 22-26, 2014. pages 341-344, IEEE, 2014. [doi]

Abstract

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