Modelling and measurements of thermomechanical stress induced drift on polysilicon resistors with different layout

Lorenzo Benvenuti, Paolo Bruschi, Luca Fanucci, Raffaele Coppeta, Sara Carniello, Luigi Di Piro, Francesco Tinfena. Modelling and measurements of thermomechanical stress induced drift on polysilicon resistors with different layout. In 14th International Conference on Design & Technology of Integrated Systems In Nanoscale Era, DTIS 2019, Mykonos, Greece, April 16-18, 2019. pages 1-5, IEEE, 2019. [doi]

Abstract

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