Optimization of GaN HEMTs with ScAlN Barrier for High 2DEG Density and Low on-Resistance

Ivan Berdalovic, Mirko Poljak, Tomislav Suligoj. Optimization of GaN HEMTs with ScAlN Barrier for High 2DEG Density and Low on-Resistance. In IEEE BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium, BCICTS 2023, Monterey, CA, USA, October 16-18, 2023. pages 314-317, IEEE, 2023. [doi]

Abstract

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