Position feedback for microrobots based on scanning probe microscopy

Arvid Bergander, Walter Driesen, A. Lal, Thierry Varidel, M. Meizoso, Hannes Bleuler, Jean-Marc Breguet. Position feedback for microrobots based on scanning probe microscopy. In 2004 IEEE/RSJ International Conference on Intelligent Robots and Systems, Sendai, Japan, September 28 - October 2, 2004. pages 1734-1739, IEEE, 2004. [doi]

Abstract

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