Low-Frequency Noise Measurements to Characterize Cu-Electromigration Down to 44nm Metal Pitch

Sofie Beyne, Olalla Varela Pedreira, Ingrid De Wolf, Zsolt Tokei, Kristof Croes. Low-Frequency Noise Measurements to Characterize Cu-Electromigration Down to 44nm Metal Pitch. In IEEE International Reliability Physics Symposium, IRPS 2019, Monterey, CA, USA, March 31 - April 4, 2019. pages 1-6, IEEE, 2019. [doi]

Abstract

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