Behavioral Modeling of a CMOS Compatible High Precision MEMS Based Electron Tunneling Accelerometer

T. K. Bhattacharyya, Anandaroop Ghosh. Behavioral Modeling of a CMOS Compatible High Precision MEMS Based Electron Tunneling Accelerometer. In 21st International Conference on VLSI Design (VLSI Design 2008), 4-8 January 2008, Hyderabad, India. pages 595-600, IEEE Computer Society, 2008. [doi]

Abstract

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