Parameter-oriented reduction strategies for a thermo-mechanical model of extreme ultraviolet reticles

Can Bikcora, Siep Weiland. Parameter-oriented reduction strategies for a thermo-mechanical model of extreme ultraviolet reticles. In 2016 IEEE Conference on Control Applications, CCA 2016, Buenos Aires, Argentina, September 19-22, 2016. pages 1149-1154, IEEE, 2016. [doi]

@inproceedings{BikcoraW16,
  title = {Parameter-oriented reduction strategies for a thermo-mechanical model of extreme ultraviolet reticles},
  author = {Can Bikcora and Siep Weiland},
  year = {2016},
  doi = {10.1109/CCA.2016.7587961},
  url = {http://dx.doi.org/10.1109/CCA.2016.7587961},
  researchr = {https://researchr.org/publication/BikcoraW16},
  cites = {0},
  citedby = {0},
  pages = {1149-1154},
  booktitle = {2016 IEEE Conference on Control Applications, CCA 2016, Buenos Aires, Argentina, September 19-22, 2016},
  publisher = {IEEE},
  isbn = {978-1-5090-0755-4},
}