Planning and scheduling for epitaxial wafer production facilities

Gabriel R. Bitran, Devanath Tirupati. Planning and scheduling for epitaxial wafer production facilities. In Proceedings of the 1987 IEEE International Conference on Robotics and Automation, Raleigh, North Carolina, USA, March 31 - April 3, 1987. pages 709, IEEE, 1987. [doi]

Abstract

Abstract is missing.