Control of heterogenous AMHS in semiconductor industry under consideration of dynamic transport carrier transfers

Patrick Boden, Sebastian Rank, Thorsten Schmidt. Control of heterogenous AMHS in semiconductor industry under consideration of dynamic transport carrier transfers. In 22nd IEEE International Conference on Industrial Technology, ICIT 2021, Valencia, Spain, March 10-12, 2021. pages 1403-1408, IEEE, 2021. [doi]

Abstract

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