Recent progress in Silicon Photonics R&D and manufacturing on 300mm wafer platform

Frédéric Boeuf, S. Cremer, E. Temporiti, M. Fere, M. Shaw, N. Vulliet, B. Orlando, D. Ristoiu, Alexis Farcy, Thierry Pinguet, Attila Mekis, Gianlorenzo Masini, P. Sun, Y. Chi, H. Petiton, S. Jan, J. R. Manouvrier, Charles Baudot, Patrick Le Maitre, J.-F. Carpentier, L. Salager, Matteo Traldi, Luca Maggi, D. Rigamonti, C. Zaccherini, C. Elemi, Bernard Sautreuil, L. Verga. Recent progress in Silicon Photonics R&D and manufacturing on 300mm wafer platform. In Optical Fiber Communications Conference and Exhibition, OFC 2015, Los Angeles, CA, USA, March 22-26, 2015. pages 1-3, IEEE, 2015. [doi]

Abstract

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